JPH0545011Y2 - - Google Patents

Info

Publication number
JPH0545011Y2
JPH0545011Y2 JP1982062902U JP6290282U JPH0545011Y2 JP H0545011 Y2 JPH0545011 Y2 JP H0545011Y2 JP 1982062902 U JP1982062902 U JP 1982062902U JP 6290282 U JP6290282 U JP 6290282U JP H0545011 Y2 JPH0545011 Y2 JP H0545011Y2
Authority
JP
Japan
Prior art keywords
sample
diameter
charged particle
particle beam
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1982062902U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58164172U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6290282U priority Critical patent/JPS58164172U/ja
Publication of JPS58164172U publication Critical patent/JPS58164172U/ja
Application granted granted Critical
Publication of JPH0545011Y2 publication Critical patent/JPH0545011Y2/ja
Granted legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
JP6290282U 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置 Granted JPS58164172U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6290282U JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6290282U JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Publications (2)

Publication Number Publication Date
JPS58164172U JPS58164172U (ja) 1983-11-01
JPH0545011Y2 true JPH0545011Y2 (en]) 1993-11-16

Family

ID=30073029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6290282U Granted JPS58164172U (ja) 1982-04-27 1982-04-27 荷電粒子線のプロ−プ径設定装置

Country Status (1)

Country Link
JP (1) JPS58164172U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234340A (en) * 1975-09-12 1977-03-16 Hitachi Ltd Coded grounding system for wire-breaking detection
JPS5812702B2 (ja) * 1977-09-05 1983-03-09 日本電子株式会社 荷電粒子プロ−ブ径の制御装置

Also Published As

Publication number Publication date
JPS58164172U (ja) 1983-11-01

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